表面高分辨弹性反冲探测分析

路秀琴; 符长波; 郭继宇; 赵葵; 梁刚; 李淑媛; 刘建成; 姜华

doi:10.11804/NuclPhysRev.17.04.228

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表面高分辨弹性反冲探测分析

路秀琴, 符长波, 郭继宇, 赵葵, 梁刚, 李淑媛, 刘建成, 姜华

文章导航 > 原子核物理评论 > 2000 > 17(4): 228-230

路秀琴, 符长波, 郭继宇, 赵葵, 梁刚, 李淑媛, 刘建成, 姜华. 表面高分辨弹性反冲探测分析[J]. 原子核物理评论, 2000, 17(4): 228-230. doi: 10.11804/NuclPhysRev.17.04.228

引用本文:

LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. doi: 10.11804/NuclPhysRev.17.04.228

Citation:

LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. doi: 10.11804/NuclPhysRev.17.04.228

表面高分辨弹性反冲探测分析

doi: 10.11804/NuclPhysRev.17.04.228

中国原子能科学研究院核物理所

High Resolution Surface Analysis with Elastic Recoil Detection

(Department of Nuclear Physics; China Institute of Atomic Energy; Beijing 102413; China);

摘要: 在中国原子能科学研究院 HI- 1 3串列加速器上建立了用 Q3D磁谱仪动量分析和ΔE- E粒子分辨对材料表面进行高分辨的弹性反冲探测分析技术 .用 1 0 0 Me V12 7I对 C/Li F多层样品的深度分布分析表明 ,表面分辨达到 1 .2 nm.所建立的ΔE(气体 ) - E(半导体 )望远镜探测器可同时分析从轻至中重的所有元素 .实测了新光电材料 Ga N,La2 Sr Cu O4 超导膜和新超硬材料 C3N4 (Si)等样品. High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.
- 弹性反冲探测 /
- 深度分辨 /
- Q3D谱仪
Abstract: High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.
- elastic recoil detection /
- depth resolution /
- Q3D magnetic spectromet

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表面高分辨弹性反冲探测分析

doi: 10.11804/NuclPhysRev.17.04.228

中国原子能科学研究院核物理所

收稿日期: 1900-01-01
修回日期: 1900-01-01
刊出日期: 2000-12-20

关键词:

弹性反冲探测 /

深度分辨 /

Q3D谱仪

摘要: 在中国原子能科学研究院 HI- 1 3串列加速器上建立了用 Q3D磁谱仪动量分析和ΔE- E粒子分辨对材料表面进行高分辨的弹性反冲探测分析技术 .用 1 0 0 Me V12 7I对 C/Li F多层样品的深度分布分析表明 ,表面分辨达到 1 .2 nm.所建立的ΔE(气体 ) - E(半导体 )望远镜探测器可同时分析从轻至中重的所有元素 .实测了新光电材料 Ga N,La2 Sr Cu O4 超导膜和新超硬材料 C3N4 (Si)等样品. High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.