Study of the Characteristics of Extracting Low-energy Broad Electron Beam into Air

In order to investigate the characteristics of extracting low-energy electron beam from vacuum into air, EGS5 is used to simulate the energy loss, beam loss and spatial distribution uniformity at the irradiation position, which is 5~10 cm to titanium foil with different thickness. The simulation results show that the transmittance is directly related to the incent energy of low-energy electron. When the titanium foil thickness is 10 μm, the inhomogeneity about the energy beam spatial distribution is below 5% on the treatment plane 5 cm away from the titanium foil. And totally meet the industrial needs.