A 1~50 keV Low-Energy Proton Implanter

The particles in the space environment are an important factor for the abnormity of spacecraft.So, it’s necessary to study on the effect of low-energy particles to spacecraft. In view of this, a 1~50 keV low-energy proton implanter has been developed in China Institute of Atomic Energy. The implanter has the
characteristics of its injection area, flux density and energy that could be adjusted in a wide range according to the requirement, almost no need mechanical change. The uniformity of the injected proton in available area is better than 90%. And the implanter has the advantages of compact structure and low cost. In this paper, the principle of implanter and the design of its main transport elements, such as lens, Wien filter and scanner, have been described. The experimental results show that the performance of the implanter meets to the demand of study. And the implanter runs steadily and reliably.