Ion Sources for Focus Ion Beam System

SHANG, ZHAO Huan-yu. Ion Sources for Focus Ion Beam System[J]. Nuclear Physics Review, 2011, 28(4): 439-443. DOI: 10.11804/NuclPhysRev.28.04.439

Citation:

SHANG, ZHAO Huan-yu. Ion Sources for Focus Ion Beam System[J]. Nuclear Physics Review, 2011, 28(4): 439-443. DOI: 10.11804/NuclPhysRev.28.04.439

Citation:

SHANG, ZHAO Huan-yu. Ion Sources for Focus Ion Beam System[J]. Nuclear Physics Review, 2011, 28(4): 439-443. DOI: 10.11804/NuclPhysRev.28.04.439

Abstract

There are two kinds of ion sources, LiquidMetal Ion Source and Gas Field Ion Source, used to provide ion beams for the Focus Ion Beam system. The working mechanism of the two kinds of sources is presented and their advantages and disadvantages are summarized. With the rapid development in the nano technology, the requirements are hardly met with these two kinds of ion sources. Therefore, a new kind of ion source, electron beam ion source, is developed for the Focus Ion Beam system. The basic principle of the electron beam ion source is introduced and the design parameters, the result of the simulation (20 kV Ar+, extracted emittance is 5.8×10^-5π·mm·mrad, raduis of the ion beam about 1 μm.) and the primary experimental results are presented.

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