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ZHANG Ling, LIU Jie, HOU Ming-dong, SUN You-mei, DUAN Jin-lai, YAO Hui-jun, MO Dan, CHEN Yan-feng. Preparation and Characterization of ZnO Films by Modified SILAR Method[J]. Nuclear Physics Review, 2009, 26(2): 154-157. DOI: 10.11804/NuclPhysRev.26.02.154
Citation: ZHANG Ling, LIU Jie, HOU Ming-dong, SUN You-mei, DUAN Jin-lai, YAO Hui-jun, MO Dan, CHEN Yan-feng. Preparation and Characterization of ZnO Films by Modified SILAR Method[J]. Nuclear Physics Review, 2009, 26(2): 154-157. DOI: 10.11804/NuclPhysRev.26.02.154
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Preparation and Characterization of ZnO Films by Modified SILAR Method

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  • A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of 002\ orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).
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