Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon
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Graphical Abstract
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Abstract
The elastic backscattering cross sections of H + from silicon for a wide energy range are very useful parameters in the proton backscattering analysis for investigating silicon content and distribution profiles in the films. It is necessary to measure the scattering cross sections with good accuracy at a large scattering angle for the applications of proton backscattering analysis. The present paper reports our measured results of differential elastic backscattering cross sections of 1.30-2.21 MeV...
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