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LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. DOI: 10.11804/NuclPhysRev.17.04.228
Citation: LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. DOI: 10.11804/NuclPhysRev.17.04.228
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High Resolution Surface Analysis with Elastic Recoil Detection

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  • High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.
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