Isotope Puzzle in Sputtering
doi: 10.11804/NuclPhysRev.15.01.043
- Received Date: 1900-01-01
- Rev Recd Date: 1900-01-01
- Publish Date: 1998-03-20
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Key words:
- sotopic enrichment /
- primary sputter effect /
- secondary sputter effect
Abstract: Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejectionangleindependent or ejectionangledependent? (2)Is the isotope angular effect the primary or the ...
Citation: | ZHENG Li-ping. Isotope Puzzle in Sputtering[J]. Nuclear Physics Review, 1998, 15(1): 43-49. doi: 10.11804/NuclPhysRev.15.01.043 |