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Article Navigation >  Nuclear Physics Review  > 1997  >  14(3): 164-166

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164
Citation: ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164
shu

Development of Cathode Vacuum Arc Ion Source

doi: 10.11804/NuclPhysRev.14.03.164

  • (Institute of Low Energy Nuclear Physics; Beijing Normal University; Beijing Radiation Center; Beijing 100875);

  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 1997-09-20
  • The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.
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Development of Cathode Vacuum Arc Ion Source

doi: 10.11804/NuclPhysRev.14.03.164
  • (Institute of Low Energy Nuclear Physics; Beijing Normal University; Beijing Radiation Center; Beijing 100875);
  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 1997-09-20

Abstract:  The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164
Citation: ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164
shu

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