Abstract: In this paper, the energy spectrum and angular distribution data of neutron source of ⁹Be (d, xn) reaction accelerator with thick target are evaluated and calculated by using PHITS program. The applicability of JQMD, INCL and INCL/DWBA nuclear reaction physical models to calculate the neutron radiation field distribution of ⁹Be (d, xn) reaction with thick target is discussed. The results show that the energy spectrum and angular distribution data of the thick target ⁹Be(d, xn) reaction calculated by the PHITS program based on the INCL/DWBA nuclear reaction physical model are in good agreement with the experimental data, and can provide more accurate neutron radiation field data for the study and application of the characteristics of ⁹Be (d, xn) reaction neutron source with thick target. In addition, the scheme of water-cooled large-area rotating beryllium target is designed, and the simulation study of target surface temperature is carried out under the condition of 5~25 MeV/5 mA incident deuterium energy. The results show that the maximum temperature of target surface can be controlled below 100 ºC.