Abstract: To study the four-dimensional (4D) emittances of the ion beams extracted from a highly charged ion source, so as to improve the ion beam coupling efficiency to downstream accelerators, a Pepper Pot type emittance probe PEMiL (Pepper pot Emittance Meter in Lanzhou) has been developed at Institute of Modern Physics (IMP). Based on the application requirements, the typical parameters of PEMiL have been refined. In the development, we utilized a quartz glass target sprayed uniformly with KBr powder as the scintillator instead of the traditional CsI scintillator to mitigate the overlapping effect of ion beam spot images, which has been validated with the measured results that the beam spot overlapping error vanishes and clear boundary spots has been obtained. For this 4D emittance probe, corresponding data processing and analyzing code has also been developed, so as to give the detailed transverse beam quality information of the incident beam in 4D phase space. In this paper, we will present the technical details about the structure design, fabrication and data processing of PEMiL. The preliminary test results of a 75 keV, 170 eμA O⁵⁺ beam emittance will also be measured. The analysis results show that beam emittance measured by PEMiL reveals a high reliability, the emittance difference that was caused by the charge accumulation effect of scintillator is lower than 25%, and PEMiL can be used as an efficient meter for the ECR ion source extracted beam property diagnostic.