Fe/Nb多层膜中离子辐照效应研究(英文)
Modification of Fe/Nb Multilayers under Xe-ion Irradiation
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摘要: 〗采用磁控溅射技术在Si衬底上沉积Si/\Fe(10 nm)/Nb(4 nm)/Fe(4 nm)/Nb(4 nm)\2/ \Fe(4 nm)/Nb(4 nm)\4多层膜。 用2 MeV的 Xe离子在室温下辐照多层膜。采用俄歇深度剖析、X射线衍射和振动样品磁强计分析辐照引起的多层膜元素分布、 结构及磁性变化。AES深度剖析谱显示当辐照注量达到1.0×1014 ions/cm2时， 多层膜界面两侧元素开始混合； 当辐照注量达到2.0×1016ions/cm2时， 多层膜层状结构消失， Fe层与Nb层几乎完全混合。XRD谱显示， 当辐照注量达到1.0×1014ions/cm2时， Nb的衍射峰和Fe的各衍射峰的峰位相对于标准卡片向小角方向偏移， 这说明辐照引起Nb基和Fe基FeNb固溶体相的形成；当辐照注量大于1.0×1015 ions/cm2时， 辐照引起非晶相的出现。 VSM测试显示，多层膜的磁性随着结构的变化而变化。 在此实验基础上， 对离子辐照引起界面混合现象的机理进行了探讨。The behavior of the metallic multilayers of Si/\Fe(10 nm)/Nb(4 nm)/Fe(4 nm)/ Nb(4 nm)\2/\Fe(4 nm)/Nb(4 nm)\4 under 2 MeV Xeion irradiation has been investigated by depth profile analysis of Auger electron spectroscopy，X ray diffraction and vibrating sample magnetometer. The obtained experimental results show that the intermixing between Fe and Nb layers occurs in the 1.0×1014 ions/cm2 irradiated multilayer sample which results in the formation of Nbbased and Febased FeNb solid solution. For the samples irradiated to fluence larger than 1.0×1014 ions/cm2， amorphisation is observed， and moreover， the layered structure of the multilayer samples is broken up completely for the samples under 1.0×1016 or 2.0×1016 ions/cm2 irradiation. Vibrating sample magnetometer measurement also reveals that the magnetization of the samples changes with the evolution of the structure of multilayers. Possible mechanism of the modification in Fe/Nb multilayers induced by Xeion irradiation is briefly discussed.Abstract: The behavior of the metallic multilayers of Si/\Fe(10 nm)/Nb(4 nm)/Fe(4 nm)/ Nb(4 nm)\2/\Fe(4 nm)/Nb(4 nm)\4 under 2 MeV Xeion irradiation has been investigated by depth profile analysis of Auger electron spectroscopy， Xray diffraction and vibrating sample magnetometer. The obtained experimental results show that the intermixing between Fe and Nb layers occurs in the 1.0×1014 ions/cm2 irradiated multilayer sample which results in the formation of Nbbased and Febased FeNb solid solution. For the samples irradiated to fluence larger than 1.0×1014 ions/cm2， amorphisation is observed， and moreover， the layered structure of the multilayer samples is broken up completely for the samples under 1.0×1016 or 2.0×1016 ions/cm2 irradiation. Vibrating sample magnetometer measurement also reveals that the magnetization of the samples changes with the evolution of the structure of multilayers. Possible mechanism of the modification in Fe/Nb multilayers induced by Xeion irradiation is briefly discussed.
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