改进的SILAR法制备ZnO薄膜及其表征
Preparation and Characterization of ZnO Films by Modified SILAR Method
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摘要: 采用一种改进的液相成膜技术——连续离子层吸附与反应(SILAR)法， 用锌氨络离子\Zn(NH3)4\2+ 溶液作为独立的前驱体溶液， 以载玻片为衬底， 在(125±5) ℃的温度下沉积出致密、 透明的ZnO薄膜。 分别用冷场发射型扫描电镜(FESEM)和X射线衍射(XRD)分析了薄膜样品的表面形貌和结晶状态， 用紫外可见分光光度计(UV-Vis spectroscopy)研究了薄膜样品的发光性能。 结果表明： 获得样品为六角纤锌矿结构的多晶薄膜材料沿\002\方向择优生长； 样品表面均匀、 致密， 厚度约为550 nm；在可见光波段具有高的透射率(＞80％)。 A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of 002\ orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).Abstract: A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of 002\ orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).
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