SPEES针尖参数对样品表面电子出射影响的模拟研究
Simulation of Tip Parameters Influence on Electron Emission in SPEES
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摘要: 报道了对扫描探针电子能谱仪（SPEES）中俄歇电子出射的理论模拟研究。 通过对俄歇电子在针尖电场作用下运动轨迹的模拟以及综合考虑从针尖场发射电子到俄歇电子出射全过程中各种因素的影响， 系统研究了针尖形状、 针尖偏压和针尖样品距离对俄歇电子出射效率的影响， 以及出射俄歇电子束流密度在针尖电场区边缘处的分布。 研究结果为提高SPEES的收集效率、 空间分辨以及能量分辨提供了重要的参考数据。 The simulation of the Auger electron emissions in scanning probe electron energy spectrometer (SPEES) is reported. By simulating the trajectory of Auger electrons, we systematically investigate the dependence of the emission efficiency of Auger electrons on the shape of tip， the biasing voltage， and the distance between the tip and sample surface， as well as the intensity distributions of Auger electrons at the edge of tipsample region. The results will be the significant reference for improving the sensitivity， spatial and energy resolutions of SPEEs.
Abstract: The simulation of the Auger electron emissions in scanning probe electron energy spectrometer (SPEES) is reported. By simulating the trajectory of Auger electrons, we systematically investigate the dependence of the emission efficiency of Auger electrons on the shape of tip， the biasing voltage， and the distance between the tip and sample surface， as well as the intensity distributions of Auger electrons at the edge of tipsample region. The results will be the significant reference for improving the sensitivity， spatial and energy resolutions of SPEEs.
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