碳离子在铝中的能量歧离和表面粗糙度

Energy Straggling of Carbon Ions in Aluminum and Surface Roughness

摘要: 用金标记卢瑟福背散射法测量了 2 .0～ 5.4Me V的¹²C离子在蒸镀在K4玻璃衬底上的Al膜中的能量歧离.由实验得出了零表面粗糙度的能量歧离 .本结果与 Bohr理论和已发表的实验工作进行了比较.The energy straggling of 2.0～5.4 MeV carbon ions in aluminum films evaporated onto K4 glass substrates was measured with the Au marked RBS method. The surface roughness with zero was obtained from experiment. It supplied a method for determination of the surface roughness with zero. The present result was compared with the Bohr theory and the results of published experimental work It is shown that the Bohr theory is not appropriate to description of the energy straggling of low energy ...

Abstract: The energy straggling of 2.0～5.4 MeV carbon ions in aluminum films evaporated onto K4 glass substrates was measured with the Au marked RBS method. The surface roughness with zero was obtained from experiment. It supplied a method for determination of the surface roughness with zero. The present result was compared with the Bohr theory and the results of published experimental work It is shown that the Bohr theory is not appropriate to description of the energy straggling of low energy ...