一台自制溅射负离子源的改进
Improvement of Model Sputter Negative Ionsource
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摘要: 自1995年以来,在中科院近物所2MV串列静电加速器上对溅射负离子源进行了调试.调试中对源体作了重大的改进,逐步完善了运行工艺,利用该离子源加速器可长时间提供Li、C、O离子束.Since 1995, the sputter ion source has been tested on the 2 MV tandem accelerator in the Institute of Modern Physics. During the experiment some important improvememts on the source were performed. The running procedure has been progressively perfect. With this vaurce, the stable Li, C,O ion beams can be delivered by the accelerator for long period.Abstract: Since 1995, the sputter ion source has been tested on the 2 MV tandem accelerator in the Institute of Modern Physics. During the experiment some important improvememts on the source were performed. The running procedure has been progressively perfect. With this vaurce, the stable Li, C,O ion beams can be delivered by the accelerator for long period.