超薄型外延硅dE/dX探测器及其在核实验中的应用

Development of Superthin Epitaxial Silicon Detectors

摘要: 本文介绍了厚度为５．２、６、７和１０μｍ，有效面积为２８～１５４ｍｍ２的超薄型外延硅ｄＥ／ｄＸ探测器（对于８．７８ＭｅＶａ粒子的能损ΔＫ的分辨为４８～７６ｋｅＶ）及其研制工艺、主要用途、测试结果及在核物理实验中的应用． The epitaxial st-dE/dX surface barrier detectors with an active area of 28～154mm2 and thickness of 5. 2～10μm have been developed. This kind of detector can be used for measuring α-particle, proton with low energy and for distinguishing particles...

Abstract: The epitaxial st-dE/dX surface barrier detectors with an active area of 28～154mm2 and thickness of 5. 2～10μm have been developed. This kind of detector can be used for measuring α-particle, proton with low energy and for distinguishing particles...