12MeV电子辐照技术在半导体器件中的应用

An Application of 12MeV Electron Irradiation in Semiconductor Devices

摘要: 本文较全面地介绍了高能１２ＭｅＶ电子辐照技术的原理、方法、特点以及在快速二极管、开关晶体管，快速可控硅中成功的应用． This article gives complete introduction to the principles, method and traits of the technology of the high-energy 12MeV electron irradiation. It also describes a successful application in fast diode, switch transistor and fast SCR.

Abstract: This article gives complete introduction to the principles, method and traits of the technology of the high-energy 12MeV electron irradiation. It also describes a successful application in fast diode, switch transistor and fast SCR.