100keV同位素分离和离子注入装置及其应用

Ion Beam Applications on a 100keV EMIS and Ion Implanter

摘要: 本文介绍了一台通用性低能离子束装置、主要性能、利用它开展的一些新的离子束应用及实验结果。 A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.

Abstract: A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.