Development of Cathode Vacuum Arc Ion Source
doi: 10.11804/NuclPhysRev.14.03.164
- Received Date: 1900-01-01
- Rev Recd Date: 1900-01-01
- Publish Date: 1997-09-20
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Key words:
- cathode vacuum /
- MEVVA ion source /
- ion implantation /
- surface modification
Abstract: The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.
Citation: | ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164 |