关键词: 
脉冲放电气体束 /
原子发射光谱 /
等离子体诊断 /
非局域热平衡

摘要: 建成了一套脉冲放电气体束和原子发射光谱等离子体诊断实验装置，利用这套实验装置测量了不同放电条件下等离子体的时间分辨发射光谱，并采用玻尔兹曼作图法和Hα谱线斯塔克展宽法研究了等离子体的原子温度、离子温度和自由电子密度等参数的演化。实验结果表明，脉冲放电的总电量对等离子体参数的演化有较大影响；脉冲放电气体束等离子体中的离子温度远高于原子温度，自由电子密度相对较低，等离子体处于非局域热平衡状态。

A special designed pulsed discharge nozzle (PDN) ion source and a plasma diagnostics system based on the atomic emission spectroscopy were constructed. The time-resolved emission spectra of Argon atoms and ions in the region of 300-800 nm were observed and analyzed. The plasma temperatures, including atomic and ionic temperatures, were simulated by Boltzmann plot method, and the free electron density was simulated through the Stark broadening of Hα line. The evolution of these plasma parameters were investigated by high-resolution time-resolved emission spectra. The results show that the total energy struck on the pulsed gas beam is the most important factor which determines the plasma properties and its evolution. The plasma in PDN is concluded into non-local thermodynamic equilibrium (non-LTE) during the evaluation because of the low electron density and the big difference between the temperatures of Argon atoms and ions in all discharge conditions.