ZnO 紫外探测器的研究

杨磊; 王柱生; 李占奎; 刘凤琼; 王秀华; 陈翠红; 李海霞; 李荣华; 戎欣娟; 祖凯玲; 李春燕; 卢子伟

doi:10.11804/NuclPhysRev.32.01.069

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ZnO 紫外探测器的研究

杨磊, 王柱生, 李占奎, 刘凤琼, 王秀华, 陈翠红, 李海霞, 李荣华, 戎欣娟, 祖凯玲, 李春燕, 卢子伟

文章导航 > 原子核物理评论 > 2015 > 32(1): 69-72

杨磊, 王柱生, 李占奎, 刘凤琼, 王秀华, 陈翠红, 李海霞, 李荣华, 戎欣娟, 祖凯玲, 李春燕, 卢子伟. ZnO 紫外探测器的研究[J]. 原子核物理评论, 2015, 32(1): 69-72. doi: 10.11804/NuclPhysRev.32.01.069

引用本文:

YANG Lei, WANG Zhusheng, LI ZhankuiLIU Fengqiong, WANG Xiuhua, CHEN Cuihong, LI Haixia, LI Ronghua, RONG Xinjuan, ZU Kailin, LI Chunyan, LU Ziwei, . Study of ZnO Ultraviolet Detector[J]. Nuclear Physics Review, 2015, 32(1): 69-72. doi: 10.11804/NuclPhysRev.32.01.069

Citation:

YANG Lei, WANG Zhusheng, LI ZhankuiLIU Fengqiong, WANG Xiuhua, CHEN Cuihong, LI Haixia, LI Ronghua, RONG Xinjuan, ZU Kailin, LI Chunyan, LU Ziwei, . Study of ZnO Ultraviolet Detector[J]. Nuclear Physics Review, 2015, 32(1): 69-72. doi: 10.11804/NuclPhysRev.32.01.069

ZnO 紫外探测器的研究

doi: 10.11804/NuclPhysRev.32.01.069

中国科学院近代物理研究所,兰州 730000;
中国科学院大学,北京 100049

Study of ZnO Ultraviolet Detector

Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China;

摘要: 利用水热法生长的N型优质ZnO晶体材料蒸镀了Au、Ag、Al金属，制备出金属-半导体-金属型(MSM)ZnO紫外探测器，测试了五种接触类型的ZnO紫外探测器(Au-ZnO-Au、Ag-ZnO-Ag、Au-ZnO-Al、Ag-ZnO-Al、Al-ZnO-Al)在365nm紫外光光照前后的I-V特性曲线。实验表明Au-ZnO-Au 型、Ag-ZnO-Ag型的探测器的光电流是暗电流的100 万倍，因此，Au-ZnO-Au型、Ag-ZnO-Ag型的ZnO紫外探测器性能比Au-ZnO-Al、Ag-ZnO-Al、Al-ZnO-Al型的优越。ZnO材料的电阻率对ZnO紫外探测器的光电流有较大的影响。在相同偏压下，电阻率越大，探测器的光电流越小。ZnO ultraviolet(UV) detectors with Metal-Semiconductor-Metal(MSM) structure were fabricated by the vacuum evaporation of Au, Ag, and Al on the n-type ZnO single crystal, which was grown with hydrothermal synthesis method. Five types of MSM ZnO detectors(Au-ZnO-Au, Ag-ZnO-Ag, Au-ZnO-Al, Ag-ZnO-Al,Al-ZnO-Al) were illuminated with 365 nm UV light respectively, and their corresponding I-V(Current-Voltage) characteristics were measured. The UV photocurrent values for Au-ZnO-Au and Ag-ZnO-Ag detectors were 1x10⁶times than their dark current values, and these facts imply that the Au-ZnO-Au and Ag-ZnO-Ag detectors were rather good UV detectors compared to Au-ZnO-Al, Ag-ZnO-Al, Al-ZnO-Al detectors. The photocurrent of the MSM ZnO detectors was also sensitive to the cubic resistance of the ZnO crystal. And it’s found that the higher resistance rate the ZnO crystal the smaller photocurrent value the detector under the same working voltage.
- ZnO /
- 紫外探测器 /
- 金属-半导体-金属
Abstract: ZnO ultraviolet(UV) detectors with Metal-Semiconductor-Metal(MSM) structure were fabricated by the vacuum evaporation of Au, Ag, and Al on the n-type ZnO single crystal, which was grown with hydrothermal synthesis method. Five types of MSM ZnO detectors(Au-ZnO-Au, Ag-ZnO-Ag, Au-ZnO-Al, Ag-ZnO-Al,l-ZnO-Al) were illuminated with 365 nm UV light respectively, and their corresponding I-V(Current-Voltage) characteristics were measured. The UV photocurrent values for Au-ZnO-Au and Ag-ZnO-Ag detectors were 1x10⁶times than their dark current values, and these facts imply that the Au-ZnO-Au and Ag-ZnO-Ag detectors were rather good UV detectors compared to Au-ZnO-Al, Ag-ZnO-Al, Al-ZnO-Al detectors. The photocurrent of the MSM ZnO detectors was also sensitive to the cubic resistance of the ZnO crystal. And it’s found that the higher resistance rate the ZnO crystal the smaller photocurrent value the detector under the same working voltage.
- ZnO /
- UV detector /
- Metal-Semiconductor-Metal

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ZnO 紫外探测器的研究

doi: 10.11804/NuclPhysRev.32.01.069

中国科学院近代物理研究所,兰州 730000;

中国科学院大学,北京 100049

收稿日期: 1900-01-01
修回日期: 1900-01-01
刊出日期: 2015-03-20

关键词:

ZnO /

紫外探测器 /

金属-半导体-金属

摘要: 利用水热法生长的N型优质ZnO晶体材料蒸镀了Au、Ag、Al金属，制备出金属-半导体-金属型(MSM)ZnO紫外探测器，测试了五种接触类型的ZnO紫外探测器(Au-ZnO-Au、Ag-ZnO-Ag、Au-ZnO-Al、Ag-ZnO-Al、Al-ZnO-Al)在365nm紫外光光照前后的I-V特性曲线。实验表明Au-ZnO-Au 型、Ag-ZnO-Ag型的探测器的光电流是暗电流的100 万倍，因此，Au-ZnO-Au型、Ag-ZnO-Ag型的ZnO紫外探测器性能比Au-ZnO-Al、Ag-ZnO-Al、Al-ZnO-Al型的优越。ZnO材料的电阻率对ZnO紫外探测器的光电流有较大的影响。在相同偏压下，电阻率越大，探测器的光电流越小。ZnO ultraviolet(UV) detectors with Metal-Semiconductor-Metal(MSM) structure were fabricated by the vacuum evaporation of Au, Ag, and Al on the n-type ZnO single crystal, which was grown with hydrothermal synthesis method. Five types of MSM ZnO detectors(Au-ZnO-Au, Ag-ZnO-Ag, Au-ZnO-Al, Ag-ZnO-Al,Al-ZnO-Al) were illuminated with 365 nm UV light respectively, and their corresponding I-V(Current-Voltage) characteristics were measured. The UV photocurrent values for Au-ZnO-Au and Ag-ZnO-Ag detectors were 1x10⁶times than their dark current values, and these facts imply that the Au-ZnO-Au and Ag-ZnO-Ag detectors were rather good UV detectors compared to Au-ZnO-Al, Ag-ZnO-Al, Al-ZnO-Al detectors. The photocurrent of the MSM ZnO detectors was also sensitive to the cubic resistance of the ZnO crystal. And it’s found that the higher resistance rate the ZnO crystal the smaller photocurrent value the detector under the same working voltage.

English Abstract

引用本文:

Citation:

YANG Lei, WANG Zhusheng, LI ZhankuiLIU Fengqiong, WANG Xiuhua, CHEN Cuihong, LI Haixia, LI Ronghua, RONG Xinjuan, ZU Kailin, LI Chunyan, LU Ziwei, . Study of ZnO Ultraviolet Detector[J]. Nuclear Physics Review, 2015, 32(1): 69-72. doi: 10.11804/NuclPhysRev.32.01.069