关键词: 
微束 /
微探针 /
离子束分析 /
单粒子效应 /
质子束刻写 /
定点单细胞照射

摘要: 通过微米孔准直或电磁聚焦技术可将加速器产生的MeV离子束形成微米尺寸的离子束斑(微束)， 从而用来研究固体和生物样品的微米空间分辨的材料信息和辐照响应。 结合MeV离子微束的发展历史综述了微束技术和跨学科应用， 包括利用微束开展具有空间分辨的离子束分析、 单粒子效应、 微纳加工和细胞辐射响应等研究。 介绍了中国科学院近代物理研究所的高能重离子微束辐照装置， 该装置成功地将总能量为1 GeV的C离子在大气中聚焦为1 μm×2 μm的微米束斑。

Beam of MeV ions from particle accelerators can be confined by collimators or focused by electrical/magnetic quadruples into micrometer size， and this microbeam can be used to obtain spatial information or radiation effect in solids and biological samples. This paper reviews the technical developments and the multidisciplinary applications of microbeam， including ion beam analysis， single event effect in semiconductor devices， proton beam writing and cellular response to targeted particle irradiations. Finally， the high energy heavy ion microbeam facility at the Institute of Modern Physics of Chinese Academy of Sciences is introduced， which has successfully focused 1 GeV Carbon ions into a beam spot of 1 μm×2 μm in air.