关键词: 
SILAR法 /
ZnO /
薄膜 /
表征

摘要: 采用一种改进的液相成膜技术——连续离子层吸附与反应(SILAR)法， 用锌氨络离子\[Zn(NH3)4\]²⁺ 溶液作为独立的前驱体溶液， 以载玻片为衬底， 在(125±5) ℃的温度下沉积出致密、 透明的ZnO薄膜。 分别用冷场发射型扫描电镜(FESEM)和X射线衍射(XRD)分析了薄膜样品的表面形貌和结晶状态， 用紫外可见分光光度计(UV-Vis spectroscopy)研究了薄膜样品的发光性能。 结果表明： 获得样品为六角纤锌矿结构的多晶薄膜材料沿\[002\]方向择优生长； 样品表面均匀、 致密， 厚度约为550 nm；在可见光波段具有高的透射率(＞80％)。 A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of [002\] orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).