ECR Ion Source of High Charge States
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摘要: 介绍了目前ECR离子源的发展状况和国际上几台典型的ECR离子源.Electron cyclotron resonance (ECR) ion source is the most efficient facility for producing highly charged ions. So far more than 1 emA of O 6+ and 0.02 eμA of U 55+ have been delivered by ECR ion source. In this paper the latest development of ECR ion source is presented and several typical ECR ion sources in the world is introduced.Abstract: Electron cyclotron resonance (ECR) ion source is the most efficient facility for producing highly charged ions. So far more than 1 emA of O 6+ and 0.02 eμA of U 55+ have been delivered by ECR ion source. In this paper the latest development of ECR ion source is presented and several typical ECR ion sources in the world is introduced.
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Key words:
- electron cyclotron resonance /
- plasma /
- high charge state /
- beam intensity
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