关键词: 
同位素富集度 /
一次溅射效应 /
二次溅射效应

摘要:  影响多元材料溅射的机制是复杂的．在多元材料溅射中，同位素溅射是最简单的．虽然仅有质量效应在同位素溅射中起优势作用，但是在离子轰击溅射中，至今仍然是个“同位素迷惑”．争论的焦点有：（１）在零剂量时，同位素富集度是与出射角无关，还是与出射角有关？（２）同位素角效应是一次溅射效应，还是二次溅射效应？如何理解碰撞级联中的动量不对称性对同位素溅射的作用？文中综述了这些争论，并阐明了本小组的观点． Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejectionangleindependent or ejectionangledependent? (2)Is the isotope angular effect the primary or the ...