一台自制溅射负离子源的改进

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一台自制溅射负离子源的改进

王贤义, 李正芳

文章导航 > 原子核物理评论 > 1998 > 15(1): 35-37

王贤义, 李正芳. 一台自制溅射负离子源的改进[J]. 原子核物理评论, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

引用本文:

王贤义, 李正芳. 一台自制溅射负离子源的改进[J]. 原子核物理评论, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

WANG Xian-yi, LI Zheng-fang. Improvement of Model Sputter Negative Ionsource[J]. Nuclear Physics Review, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

Citation:

WANG Xian-yi, LI Zheng-fang. Improvement of Model Sputter Negative Ionsource[J]. Nuclear Physics Review, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

一台自制溅射负离子源的改进

doi: 10.11804/NuclPhysRev.15.01.035

中国科学院近代物理研究所

Improvement of Model Sputter Negative Ionsource

Institute of Modern Physics; the Chinese Academy of Sciences; Lanzhou 730000

摘要: 自１９９５年以来，在中科院近物所２ＭＶ串列静电加速器上对溅射负离子源进行了调试．调试中对源体作了重大的改进，逐步完善了运行工艺，利用该离子源加速器可长时间提供Ｌｉ、Ｃ、Ｏ离子束.Since 1995, the sputter ion source has been tested on the 2 MV tandem accelerator in the Institute of Modern Physics. During the experiment some important improvememts on the source were performed. The running procedure has been progressively perfect. With this vaurce, the stable Li, C,O ion beams can be delivered by the accelerator for long period.
- 溅射源 /
- 绝缘法兰 /
- 电离器 /
- 阴极负载
Abstract: Since 1995, the sputter ion source has been tested on the 2 MV tandem accelerator in the Institute of Modern Physics. During the experiment some important improvememts on the source were performed. The running procedure has been progressively perfect. With this vaurce, the stable Li, C,O ion beams can be delivered by the accelerator for long period.
- putter ion source /
- insulated flange /
- ionizer cathode load /

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一台自制溅射负离子源的改进

doi: 10.11804/NuclPhysRev.15.01.035

中国科学院近代物理研究所

收稿日期: 1900-01-01
修回日期: 1900-01-01
刊出日期: 1998-03-20

关键词:

摘要: 自１９９５年以来，在中科院近物所２ＭＶ串列静电加速器上对溅射负离子源进行了调试．调试中对源体作了重大的改进，逐步完善了运行工艺，利用该离子源加速器可长时间提供Ｌｉ、Ｃ、Ｏ离子束.Since 1995, the sputter ion source has been tested on the 2 MV tandem accelerator in the Institute of Modern Physics. During the experiment some important improvememts on the source were performed. The running procedure has been progressively perfect. With this vaurce, the stable Li, C,O ion beams can be delivered by the accelerator for long period.

English Abstract

王贤义, 李正芳. 一台自制溅射负离子源的改进[J]. 原子核物理评论, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

引用本文:

王贤义, 李正芳. 一台自制溅射负离子源的改进[J]. 原子核物理评论, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

WANG Xian-yi, LI Zheng-fang. Improvement of Model Sputter Negative Ionsource[J]. Nuclear Physics Review, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

Citation:

WANG Xian-yi, LI Zheng-fang. Improvement of Model Sputter Negative Ionsource[J]. Nuclear Physics Review, 1998, 15(1): 35-37. doi: 10.11804/NuclPhysRev.15.01.035

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