关键词: 
弹性共振背散射（EBSR） /
卢瑟福背散射（RBS） /
质子X射线荧光分析（PIXE） /
等效薄靶 /
反应截面 /
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摘要: 阐述了利用离子束分析技术分析高温超导氧化物陶瓷Ｙ－Ｂａ－Ｃｕ－Ｏ中各成分含量的一般原理．运用α粒子在３．０４５ＭｅＶ附近和Ｏ的弹性共振背散射以及卢瑟福背散射，得到了Ｙ－Ｂａ－Ｃｕ－Ｏ各成分的含量，并与质子Ｘ射线荧光分析的结果作了比较，提出了一种简单的背散射处理方法．该方法具有简单、快速、槽度高等优点． In this paper,the general principles of ion-beam analysis technique are de-scribed in analyzing element-contents of high-temperature superconductivity oxidised ceramic Y-Ba-Cu-O.We have obtained element-contents of Y-Ba-Cu-O by using the 3.045MeV He-4 elastic backscattering resonance(EBSR),Rutherford backscattering(RBS)and proton in--duced X-ray emission (PIX).A simple method are proposed,which deals with RBS and EBSR spectra. It is proved to be completely available.