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全反射X荧光分析及其应用

田宇紱 王瑞光 谭继廉

田宇紱, 王瑞光, 谭继廉. 全反射X荧光分析及其应用[J]. 原子核物理评论, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
引用本文: 田宇紱, 王瑞光, 谭继廉. 全反射X荧光分析及其应用[J]. 原子核物理评论, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
Tian Yuhong, Wang Ruiguang, Tan Ji-lian. Application of Total-reflection X-ray Fluorescence Analysis[J]. Nuclear Physics Review, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
Citation: Tian Yuhong, Wang Ruiguang, Tan Ji-lian. Application of Total-reflection X-ray Fluorescence Analysis[J]. Nuclear Physics Review, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034

全反射X荧光分析及其应用

doi: 10.11804/NuclPhysRev.12.03.034

Application of Total-reflection X-ray Fluorescence Analysis

  • 摘要: 近年来,全反射X荧光分析技术获得突破性进展.从表面及近表层微量、超微量元素分析发展到结构、深度及深度分布的探测.其检测限已达pg级,硅片杂质检测限达108atoms/cm2.文章介绍了该技术的基本理论、特点、国内外最新发展情况及对其今后发展的展望. In recent years a remarkable development has been achieved in total-reflection X-ray fluorescence (TXRF) analysis techniques. The trace and ulera-trace analysis of elements has been made out from surface and near-surface layer to depth and depth profiling as well as layered structures. Absolute detectoion limits has come to pg-level and the least detection limits of 108atoms/cm2 can be reached for surface contamination on St wafers. The basic theory, characteristic, recent...
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出版历程
  • 收稿日期:  1900-01-01
  • 修回日期:  1900-01-01
  • 刊出日期:  1995-09-20

全反射X荧光分析及其应用

doi: 10.11804/NuclPhysRev.12.03.034

摘要: 近年来,全反射X荧光分析技术获得突破性进展.从表面及近表层微量、超微量元素分析发展到结构、深度及深度分布的探测.其检测限已达pg级,硅片杂质检测限达108atoms/cm2.文章介绍了该技术的基本理论、特点、国内外最新发展情况及对其今后发展的展望. In recent years a remarkable development has been achieved in total-reflection X-ray fluorescence (TXRF) analysis techniques. The trace and ulera-trace analysis of elements has been made out from surface and near-surface layer to depth and depth profiling as well as layered structures. Absolute detectoion limits has come to pg-level and the least detection limits of 108atoms/cm2 can be reached for surface contamination on St wafers. The basic theory, characteristic, recent...

English Abstract

田宇紱, 王瑞光, 谭继廉. 全反射X荧光分析及其应用[J]. 原子核物理评论, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
引用本文: 田宇紱, 王瑞光, 谭继廉. 全反射X荧光分析及其应用[J]. 原子核物理评论, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
Tian Yuhong, Wang Ruiguang, Tan Ji-lian. Application of Total-reflection X-ray Fluorescence Analysis[J]. Nuclear Physics Review, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034
Citation: Tian Yuhong, Wang Ruiguang, Tan Ji-lian. Application of Total-reflection X-ray Fluorescence Analysis[J]. Nuclear Physics Review, 1995, 12(3): 34-39. doi: 10.11804/NuclPhysRev.12.03.034

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