An Application of 12MeV Electron Irradiation in Semiconductor Devices
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摘要: 本文较全面地介绍了高能１２ＭｅＶ电子辐照技术的原理、方法、特点以及在快速二极管、开关晶体管，快速可控硅中成功的应用． This article gives complete introduction to the principles, method and traits of the technology of the high-energy 12MeV electron irradiation. It also describes a successful application in fast diode, switch transistor and fast SCR.Abstract: This article gives complete introduction to the principles, method and traits of the technology of the high-energy 12MeV electron irradiation. It also describes a successful application in fast diode, switch transistor and fast SCR.
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Key words:
- high-energy electron /
- fast diode /
- switch transistor /
- fast SCR /
- the lifetime of minority
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