Ion Beam Applications on a 100keV EMIS and Ion Implanter
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摘要: 本文介绍了一台通用性低能离子束装置、主要性能、利用它开展的一些新的离子束应用及实验结果。 A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.Abstract: A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.
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Key words:
- isotope separation /
- ion implantation /
- material modification /
- 57Fe /
- C60
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