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α-Si1-xCx:H薄膜材料的弹性反冲探测分析

周平 路秀琴 郭继宇 赵葵 吴伟明 隋丽 倪嵋楠 梅俊平 罗红兵 刘建成

周平, 路秀琴, 郭继宇, 赵葵, 吴伟明, 隋丽, 倪嵋楠, 梅俊平, 罗红兵, 刘建成. α-Si1-xCx:H薄膜材料的弹性反冲探测分析[J]. 原子核物理评论, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
引用本文: 周平, 路秀琴, 郭继宇, 赵葵, 吴伟明, 隋丽, 倪嵋楠, 梅俊平, 罗红兵, 刘建成. α-Si1-xCx:H薄膜材料的弹性反冲探测分析[J]. 原子核物理评论, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
Citation: ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249

α-Si1-xCx:H薄膜材料的弹性反冲探测分析

doi: 10.11804/NuclPhysRev.21.03.249

Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films

  • 摘要: 介绍在中国原子能科学研究院HI-13串列加速器上,对α-Si1-xCx:H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质^127Ⅰ束流轰击α-Si1-xCx:H薄膜材料样品,用△E(gas)一E(PSD)望远镜探测器,在前角区(30。角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.
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出版历程
  • 收稿日期:  1900-01-01
  • 修回日期:  1900-01-01
  • 刊出日期:  2004-09-20

α-Si1-xCx:H薄膜材料的弹性反冲探测分析

doi: 10.11804/NuclPhysRev.21.03.249

摘要: 介绍在中国原子能科学研究院HI-13串列加速器上,对α-Si1-xCx:H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质^127Ⅰ束流轰击α-Si1-xCx:H薄膜材料样品,用△E(gas)一E(PSD)望远镜探测器,在前角区(30。角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.

English Abstract

周平, 路秀琴, 郭继宇, 赵葵, 吴伟明, 隋丽, 倪嵋楠, 梅俊平, 罗红兵, 刘建成. α-Si1-xCx:H薄膜材料的弹性反冲探测分析[J]. 原子核物理评论, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
引用本文: 周平, 路秀琴, 郭继宇, 赵葵, 吴伟明, 隋丽, 倪嵋楠, 梅俊平, 罗红兵, 刘建成. α-Si1-xCx:H薄膜材料的弹性反冲探测分析[J]. 原子核物理评论, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249
Citation: ZHOU Ping, LU Xiu-qin, GUO Ji-yu, ZHAO Kui, WU Wei-ming, SUI Li, NI Mei-nan, MEI Jun-ping, LUO Hong-bing, LIU Jian-cheng. Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films[J]. Nuclear Physics Review, 2004, 21(3): 249-252. doi: 10.11804/NuclPhysRev.21.03.249

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