Elastic Recoil Detection Analysis of α-Si_(1-x)C_x∶H Thin Films
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摘要: 介绍在中国原子能科学研究院HI-13串列加速器上,对α-Si1-xCx:H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质^127Ⅰ束流轰击α-Si1-xCx:H薄膜材料样品,用△E(gas)一E(PSD)望远镜探测器,在前角区(30。角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.
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关键词:
- 非晶氢化硅碳薄膜 /
- 弹性反冲探测分析 /
- 能隙宽度 /
- △E-E望远镜探测器 /
- 能谱拟合
Abstract: Elastic recoil detection analysis of α-Si_(1-x)C_(x)∶H foils has been performed at the HI-13 tandem accelerator of CIAE. High quality~(127)I beam bombards the target of α -Si_(1-x)C_(x)∶H_( ) thin film. A ΔE(gas)-(E(PSD)) telescope was used to measure the energy spectra of all elements recoiled from the samples at the angle of 30° in laboratory system. Components of H, C and Si and the profiles were obtained by simulation of the energy spectra using the program SIMNRA calculation.-
Key words:
- elastic recoil detection analysis /
- amorphous silicon carbon film /
- ΔE-E telescope /
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