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合金溅射轰击诱发的吉布斯偏析现象

郑里平

郑里平. 合金溅射轰击诱发的吉布斯偏析现象[J]. 原子核物理评论, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
引用本文: 郑里平. 合金溅射轰击诱发的吉布斯偏析现象[J]. 原子核物理评论, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
Citation: ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061

合金溅射轰击诱发的吉布斯偏析现象

doi: 10.11804/NuclPhysRev.20.01.061

Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering

  • 摘要: 建立了包括质量效应、键合效应和轰击诱发吉布斯偏析效应的蒙特卡罗模拟程序;并对轰击诱发吉布斯偏析效应的两大特征(表面成分梯度特征和表面成分梯度的中间性特征)进行了研究.模拟解析了为何在被轰击合金表面形成了一个偏析元素的成分梯度;为何被轰击合金表面的成分梯度、溅射角分布和溅射产额具有中间性特征. In 1982, phenomena of bombardmentinduced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardmentinduced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...
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出版历程
  • 收稿日期:  1900-01-01
  • 修回日期:  1900-01-01
  • 刊出日期:  2003-03-20

合金溅射轰击诱发的吉布斯偏析现象

doi: 10.11804/NuclPhysRev.20.01.061

摘要: 建立了包括质量效应、键合效应和轰击诱发吉布斯偏析效应的蒙特卡罗模拟程序;并对轰击诱发吉布斯偏析效应的两大特征(表面成分梯度特征和表面成分梯度的中间性特征)进行了研究.模拟解析了为何在被轰击合金表面形成了一个偏析元素的成分梯度;为何被轰击合金表面的成分梯度、溅射角分布和溅射产额具有中间性特征. In 1982, phenomena of bombardmentinduced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardmentinduced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...

English Abstract

郑里平. 合金溅射轰击诱发的吉布斯偏析现象[J]. 原子核物理评论, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
引用本文: 郑里平. 合金溅射轰击诱发的吉布斯偏析现象[J]. 原子核物理评论, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061
Citation: ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061

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